| Manufacturer's Description |
| The automated gas distribution manifold
enables a single GASGUARD gas cabinet to
supply UHP gas to as many as eight use
points. This reduces gas cabinet requirements
by 50 percent or more, decreases equipment
and piping needs, cuts air handling and space
requirements, and lowers the number of
cylinders that are stored or in use. The mass customized VMB is available in
four, six, and eight stick configurations.
Design is modular to allow addition of future
sticks. The controller can operate up to eight
process gas lines independently. Start, stop,
purge, and evacuate operations can be
accomplished safely with the controller.
The GASGUARD VMB has several levels of
automation from automatic shutoff of each
stick to full automation of the purge operation.
When installed in the tool service area,
the VMB shortens critical piping runs,
making tool purging quicker and more
convenient. While line purges are performed,
other tools can be kept operational without
interrupting process gas flow. |
